发明名称 |
Method and apparatus for analyzing gas flow in a gas panel |
摘要 |
One embodiment of the present invention is a method for analyzing gas flow in a gas transmission unit of a gas panel that includes: (a) monitoring a measure of gas flow output from a mass flow controller included in the gas transmission unit; (b) monitoring a measure of gas pressure output from a pressure regulator included in the gas transmission unit; and (c) analyzing the measure of gas flow and the measure of gas pressure to determine whether gas flow is stable in the gas transmission unit.
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申请公布号 |
US2004143404(A1) |
申请公布日期 |
2004.07.22 |
申请号 |
US20030346515 |
申请日期 |
2003.01.17 |
申请人 |
APPLIED MATERIALS, INC. |
发明人 |
BARROS PHILIP R.;MARTIN RAUL A.;NORMAN RUSSELL T.;MELCER CHRIS |
分类号 |
G01F15/04;G01F23/00;G01L7/00;G01N11/00;G05B21/02;(IPC1-7):G01N11/00 |
主分类号 |
G01F15/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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