发明名称 Method of fabricating an integrated circuit and semiconductor chip
摘要 A semiconductor chip in which stress on the effective stress on the substrate is reduced in order to reduce bowing. To reduce the effective stress, a stress compensation layer is provided on the backside of the chip. The stress compensating layer produces a stress opposite of that produced by the IC. Thus the overall or effective stress on the substrate is reduced.
申请公布号 AU2003298198(A8) 申请公布日期 2004.07.22
申请号 AU20030298198 申请日期 2003.12.17
申请人 INFINEON TECHNOLOGIES AG 发明人 JINGYU LIAN;UWE WELLHAUSEN;RAINER BRUCHHAUS;STEFAN GERNHARDT;ANDREAS HILLIGER;NICOLAS NAGEL
分类号 H01L21/8246;H01L23/00 主分类号 H01L21/8246
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