发明名称 Semiconductor device and manufacturing method for the same
摘要 A semiconductor device, comprising: a semiconductor substrate providing a semiconductor element; and a hard film which covers a part or the entirety of a side of the semiconductor substrate and which has top and bottom surfaces in approximately the same planes as those of the top and bottom surfaces of the semiconductor substrate, wherein the side of the semiconductor substrate covered with the hard film is processed so as to be perpendicular or substantially perpendicular to the surface of the semiconductor substrate. <IMAGE>
申请公布号 EP1439577(A2) 申请公布日期 2004.07.21
申请号 EP20030029194 申请日期 2003.12.18
申请人 SHARP KABUSHIKI KAISHA 发明人 TOKUSHIGE, NOBUAKI
分类号 H01L21/3205;H01L21/00;H01L21/4763;H01L21/78;H01L23/52;H01L29/78;(IPC1-7):H01L21/78 主分类号 H01L21/3205
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