发明名称 |
Method for producing a transition edge sensor |
摘要 |
A method of producing a transition edge sensor comprises depositing a sensing material upon a substrate to form a sensing layer having an associated transition temperature. The transition temperature for the sensing layer is selected as desired. The desired transition temperature is produced by controlling the temperature of the substrate for the deposition process.
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申请公布号 |
US6765207(B2) |
申请公布日期 |
2004.07.20 |
申请号 |
US20020134444 |
申请日期 |
2002.04.30 |
申请人 |
OXFORD INSTR SUPERCONDUCTIVITY |
发明人 |
GOLDIE DAVID JOHN;GU ERDAN |
分类号 |
G01K11/12;H01L39/10;(IPC1-7):H01L27/18 |
主分类号 |
G01K11/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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