发明名称 Method for producing a transition edge sensor
摘要 A method of producing a transition edge sensor comprises depositing a sensing material upon a substrate to form a sensing layer having an associated transition temperature. The transition temperature for the sensing layer is selected as desired. The desired transition temperature is produced by controlling the temperature of the substrate for the deposition process.
申请公布号 US6765207(B2) 申请公布日期 2004.07.20
申请号 US20020134444 申请日期 2002.04.30
申请人 OXFORD INSTR SUPERCONDUCTIVITY 发明人 GOLDIE DAVID JOHN;GU ERDAN
分类号 G01K11/12;H01L39/10;(IPC1-7):H01L27/18 主分类号 G01K11/12
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