| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a semiconductor acceleration sensor allowing reduction of the number of component items, and reduction of thickness. <P>SOLUTION: A plumb bob 5 is composed of: a body part 30 fixed to a plumb bob fixing part 7; and projecting parts 31 projecting from the body part 30 into a space between the inside surface 13 of a support part 9, and an exposed surface 25 of a base 3, and having first abutting parts 41 abutting on the inside surface 13 when the plumb bob 5 is displaced by a predetermined amount toward a flexible part 11, and second abutting parts 45 abutting on the exposed surface 25 when the plumb bob is displaced by a predetermined amount toward the base 3. A first stopper structure for specifying the range of the displacement amount for displacing the plumb bob 5 toward the flexible part 11 and in a radial direction around a center line C by the inside surface 13 and the first abutting parts 41, is composed; and a second stopper structure for specifying the range of the displacement amount for displacing the plumb bob 5 toward the base 3 by the exposed surface 25 and the second abutting parts 45, is composed. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
