| 摘要 |
PROBLEM TO BE SOLVED: To provide an energy filter with reduced aberration and an electron microscope using it. SOLUTION: This energy filter has a first step filter 12 converging an electron beam incident along an optical axis L0 in one direction vertical to the optical axis L0, and a second step filter 14 disposed in a post-stage of the first step filter 12 along the optical axis L0 and having the same length as the first step filter 12 along the optical axis L0, and made so that the electron beam converged by the first step filter 12 is made incident and an orbit of the electron beam is reversed around a convergence position. The first step filter 12 and the second step filter 14 have electric and the magnetic quadrupole fields along the optical axis L0 with angle of 45 degrees mutually around the optical axis L0, and realize convergence without astigmatism by the electric and the magnetic quadrupole fields respectively. COPYRIGHT: (C)2004,JPO&NCIPI
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