APPARATUS AND METHOD FOR LIMITING OVER TRAVEL IN A PROBE CARD ASSEMBLY
摘要
Methods and apparatuses for testing semiconductor devices are disclosed. Over travel stops limit over travel of a device to be tested with respect to probes of a probe card assembly. Feedback control techniques are employed to control relative movement of the device and the probe card assembly. A probe card assembly includes flexible base for absorbing excessive over travel of the device to be tested with respect to the probe card assembly.
申请公布号
WO2004059331(A2)
申请公布日期
2004.07.15
申请号
WO2003US40316
申请日期
2003.12.15
申请人
FORMFACTOR, INC.
发明人
COOPER, TIMOTHY, E.;ELDRIDGE, BENJAMIN, N.;REYNOLDS, CARL, V.;SHENOY, RAVINDRA, V.