RETAINING DEVICE AND METHOD FOR SUPPLYING HEAT TO OR DISCHARGING HEAT FROM A SUBSTRATE

摘要

The invention relates to a retaining device (5) which is characterized in that a retaining element (11) on which a substrate is electrostatically fixed is disposed on a substrate electrode (19). In a first embodiment, a load element (10) is disposed on the substrate electrode (19) and forces the retaining element (11) onto the same. Said load element (10) is linked with a base (17) carrying the substrate electrode (19) via a clamping device (22, 23, 24) that forces the load element onto the substrate electrode (19). The load element (10) and the base (17) are electrically insulated from the substrate electrode (19). In a second embodiment, the side of the retaining element (11) facing the substrate (12) is provided with an electrically insulating ferroelectric or piezoelectric element (26). According to a third embodiment, the retaining element is provided with a device (30, 31, 32, 33, 34, 35, 36) by way of which a liquid convection medium (30) can be supplied to or discharged from the intermediate space (27) defined by the retaining element (11) and the substrate (19). The invention further relates to a method for supplying heat to or discharging heat from the back of a substrate (12) whose front is exposed to heat, said substrate being held by one of the inventive retaining devices (5).