METHOD AND APPARATUS FOR MANUFACTURING TRANSPARENT CONDUCTIVE FILM SUBSTRATE, COLOR FILTER SUBSTRATE AND ITS MANUFACTURING METHOD, ELECTROOPTIC APPARATUS AND ELECTRONIC EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for manufacturing a transparent conductive film for forming a transparent conductive film with low specific resistance and high quality on a substrate having a material with low heat resistance such as a resin not under a high temperature condition, an apparatus for manufacturing the film for use in the method, a method for manufacturing a color filter substrate, a color filter substrate manufactured by that method, an electrooptic apparatus with the filter substrate mounted thereon and electronic equipment with the electrooptic apparatus mounted thereon.

SOLUTION: A desired transparent conductive film with low specific resistance can be formed not under the high temperature condition by applying a pulse voltage with a duty ratio between 0.01 and 0.25.

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