| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that it has not been possible to measure an accurate mixture ratio (composition) when the pressure of multi-component mixed gases is not of the atmospheric pressure at measurement on the composition of the multi-component mixed gases and that it has not been possible to measure mixed gases which may pose explosion hazards by a measuring method by irradiating heat and light. SOLUTION: Constituent gases of the multi-component mixed gases are previously known such as the multi-component mixed gases of nitrogen, oxygen, and ozone, and their composition is univocally defined from the viscosity of the mixed gases. For simultaneous pressure measurement, an absolute pressure probe 1 such as a diaphragm gauge for measuring absolute pressure and a crystal friction vacuum gauge or a spinning rotor gauge sensitive to a material property value of gases such as viscosity or a pressure probe 2 sensitive to another material property value are connected to piping 4 of multi-component mixed gases in which the mixture ratio of ozone is not known. The true material property values of the multi-component mixed gases is determined from both pressure measurement values, their composition is determined from corresponding data of the material property values and composition. COPYRIGHT: (C)2004,JPO&NCIPI
|
