发明名称 METHOD FOR SELECTIVELY DEPOSITING ORGANIC SEMICONDUCTOR
摘要 PURPOSE: A method for selectively depositing an organic semiconductor is provided to decrease the number or processes and have no limit to a minimum pattern size caused by the thickness of a shadow mask by forming a pattern during a deposition process while using the shadow mask. CONSTITUTION: At least two different materials(2,3) are disposed on the surface of a substrate(1). The deposition rate of an organic semiconductor(4) deposited on the different materials is controlled to deposit the organic semiconductor only on a specific material. The different materials are patterned by a deposition process of a thin film and a photolithography process so as to dispose the different materials on the surface of the substrate.
申请公布号 KR20040063325(A) 申请公布日期 2004.07.14
申请号 KR20030000701 申请日期 2003.01.07
申请人 JANG, JIN 发明人 CHO, GYU SIK;HUH, JI HO;JANG, JIN;JUNG, JI SIM
分类号 H01L21/20;(IPC1-7):H01L21/20 主分类号 H01L21/20
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