发明名称 |
METHOD FOR SELECTIVELY DEPOSITING ORGANIC SEMICONDUCTOR |
摘要 |
PURPOSE: A method for selectively depositing an organic semiconductor is provided to decrease the number or processes and have no limit to a minimum pattern size caused by the thickness of a shadow mask by forming a pattern during a deposition process while using the shadow mask. CONSTITUTION: At least two different materials(2,3) are disposed on the surface of a substrate(1). The deposition rate of an organic semiconductor(4) deposited on the different materials is controlled to deposit the organic semiconductor only on a specific material. The different materials are patterned by a deposition process of a thin film and a photolithography process so as to dispose the different materials on the surface of the substrate.
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申请公布号 |
KR20040063325(A) |
申请公布日期 |
2004.07.14 |
申请号 |
KR20030000701 |
申请日期 |
2003.01.07 |
申请人 |
JANG, JIN |
发明人 |
CHO, GYU SIK;HUH, JI HO;JANG, JIN;JUNG, JI SIM |
分类号 |
H01L21/20;(IPC1-7):H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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