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发明名称
摘要
申请公布号
JP3541811(B2)
申请公布日期
2004.07.14
申请号
JP20010046527
申请日期
2001.02.22
申请人
发明人
分类号
H01L23/52;H01L21/314;H01L21/3205;(IPC1-7):H01L21/314;H01L21/320
主分类号
H01L23/52
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