| 摘要 |
<p>The invention relates to a method and an apparatus for the detection of defects (13) in or on the surface of an object with a high degree of accuracy. This is obtained y an apparatus comprising image forming means (2, 3, 4, 6) for generating an image of the defect (13), first (1) and second (18) light sources and filter means (14), preferably of the Schlieren type. The defects (13) can be detected without moving the optical parts of the apparatus and the object relative to each other by using two light sources (1, 18) to generate an image on light sensitive elements (CCD array (7)).</p> |
