| 摘要 |
PROBLEM TO BE SOLVED: To provide a pipe-cleaning mechanism for an MOCVD apparatus to keep an effective cross-sectional area of exhaust piping constant at all times, by transferring a product produced in the exhaust piping to an area which is not affected by a process, without the need for removing the exhaust piping. SOLUTION: The pipe-cleaning mechanism is configured with a shaft unit 10 placed in the exhaust piping 6 and comprising a spiral shaft unit 101, on which a spring 102 is wound; a shaft unit mechanism 12 located at the end face of the piping; and a power transmission mechanism 11 for transmitting torque to the shaft unit 10, and cleans the piping, by turning the shaft unit 10 to transfer the product adhered to the inner wall face of the exhaust piping 6 from an exhaust gas entrance 8 to the end face of the piping. COPYRIGHT: (C)2004,JPO&NCIPI
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