| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for forming electrodes with a prescribed pattern to at least a side face of a vibrator and forming an electrode pattern with high accuracy even when the vibrator is downsized. <P>SOLUTION: A substrate 1 for the vibrator is prepared. The substrate 1 has a pair of principal faces 1a, 1b, and side faces 1c, 1d. A conductive film 3 is formed to at least the side faces 1c, 1d of the substrate 1. Then a resist film 4A is formed on the conductive film 3. Masks 8A, 8B each having an opening 8a are placed on the principal faces 1a, 1b. The resist film 4 on the side faces 1c, 1d is exposed from the opening 8a to apply patterning to the resist film 4. Etching the conductive film 3 on the side faces 1c, 1d corresponding to the exposure pattern of the resist film 4 forms the electrodes. <P>COPYRIGHT: (C)2004,JPO&NCIPI |
