APPARATUS AND PROCESS FOR PLASMA DISCHARGE TREATMENT, THIN FILM AND LAMINATE MANUFACTURED BY THE PROCESS, OPTICAL FILM, AND POLARIZER AND IMAGE DISPLAY DEVICE USING THE OPTICAL FILM

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a thin film with high productivity capable of continuously treating wide base materials at high speed dispensing with a vacuum unit and high temperature treatment, and even when an inexpensive and safe reactive gas such as nitrogen is used, a method for forming a multilayer laminate of a uniform thin film, an optical film of the thin film laminate formed by the method, and a polarizer and an image display device using the optical film. SOLUTION: This invention is a plasma discharge treatment apparatus equipped with a pair of opposing electrodes consisting of a first and a second electrodes and a discharge section. In the discharge section, a base material treated while passing a side closer to one electrode of the opposing electrodes is carried to the discharge section while passing again a side closer to the other electrode. A means is provided for supplying a reacting gas of atmospheric or nearly atmospheric pressure between the base materials reciprocatingly passing in the discharge section and high-frequency voltage components differing from each other are applied to the first and the second electrodes, respectively. COPYRIGHT: (C)2004,JPO&NCIPI