| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning aligner which establishes a speedy and accurate alignment system. SOLUTION: Three or more position detecting systems 14a, 14b, and 14c are provided to an exposure light TTR microscope mounted on the scanning aligner, and the position detecting systems 14a, 14b, and 14c are each provided with a drive mechanism for making the TTR microscope observe an optional position. The detection ranges of, at least, the first position detecting system 14a and the second position detecting system 14b are extended nearly perpendicular to the scanning direction of an original stage 2, and the detection range of the third position detecting system 14c is extended nearly parallel to the scanning direction of the original stage 2. The third position detecting system 14c observes an optional position located inside and outside a lighting range of exposure light, and the standby position of the third position detecting system 14c when the image of an original pattern is projected onto a substrate 8 for exposure is substantially at the same position as a part of its detecting range or adjacent to it. COPYRIGHT: (C)2004,JPO&NCIPI
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