ACTUATOR AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a compact and easily manufacturable actuator capable of controlling an arm part with high precision and to provide its manufacturing method.

SOLUTION: This actuator 1 is integrally formed by monocrystal silicon and is provided with a silicon structural body 10 having a pair of arm parts 12 and a connection part 15 connecting them and piezoelectric elements 30 attached to each arm part 12.

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