| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and device for inspecting semiconductor integrated circuit, by which a semiconductor integrated circuit to be inspected is inspected based on a standstill power-supply current, even when the integrated circuit cannot be made to become standstill in a plurality of different internal states. SOLUTION: The power-supply current of the semiconductor integrated circuit 100 to be inspected is measured, during the inputting period of a second signal used for setting the circuit 100 to a standing-still state, by alternately inputting a first signal used for setting the circuit 100 to an activated state and the second signal in a fixed cycle. A series of measurement data, obtained by repeatedly measuring the standstill power-supply current in the same internal state, has regularity with the current value dropping as the measurement is repeated. By utilizing this regularity, the normal/defective condition of the circuit 100 can be decided. COPYRIGHT: (C)2004,JPO&NCIPI
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