PROCESS OF FABRICATING LIQUID CRYSTAL DISPLAY

摘要

PURPOSE: A process of fabricating an LCD(liquid crystal display) is provided to prevent problems caused by static electricity when a glass substrate is separated from a vacuum chuck. CONSTITUTION: A thin film(31) is deposited on a glass substrate(30). The glass substrate is adsorbed on a vacuum chuck(40). The thin film formed on the glass substrate is patterned using photolithography. An ionizer(32) is turned on using a controller at the moment of time when the vacuum adsorption of the vacuum chuck is off to accomplish potential balance. The glass substrate is separated from the vacuum chuck. The thin film formed on the glass substrate includes a metal layer, a metal/insulating layer or an insulating layer.