发明名称 System and a method for plating of a conductive pattern
摘要 The invention presents methods and systems for plating conductive patterns which at least result in a high uniformity and avoid parasitical plating effects. A plating system is disclosed for plating conductive patterns formed at a first surface of a substrate. The system is such that exposure surfaces not to be plated is inhibited. A first electrode of the system is immersed in the plating solution while the second electrode is in contact with another than the first surface of the substrate. The conductive patterns to be plated are temporarily electrically connected with the second electrode.
申请公布号 US6758958(B1) 申请公布日期 2004.07.06
申请号 US20010744465 申请日期 2001.04.16
申请人 INTERUNIVERSITAIR MICRO-ELEKTRONICA CENTRUM;SIEMENS AKTIENGESELLSCHAFT 发明人 STEENKISTE FILIP VAN;BAERT KRIS;GUMBRECHT WALTER;ARQUINT PHILIPPE
分类号 C25D5/02;C25D17/00;H01L21/288;H01L21/768;H01R12/00;(IPC1-7):C25D5/02 主分类号 C25D5/02
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