| 摘要 |
PURPOSE: A method for manufacturing an LCD(Liquid Crystal Display) is provided to divide a pattern with wide width into patterns having narrow width and then form a resist pattern uniformly, thereby capable of preventing the etching badness caused by the resist with uneven thickness. CONSTITUTION: After coating a buffer layer(103) such as metal, an organic film or silicon on a substrate(101), grooves(105a-105c) are formed on the substrate(101) through a photolithography process, thereby forming a cliche(100). Since patterns designed to the same layer are various, the sizes of the grooves(105a-105c) are also various. The first groove(105a) forms an optimum print pattern. When the line width of the first groove(105a) is d1, the second groove(105b) has a line width of d2 which is narrower than d1 of the first groove(105a). The third groove(105c) has a line width of d3 which is wider than d1 of the first groove(105a). The third groove(105c) is formed by two or more first groove(105a) separated with a predetermined interval(w). When a resist having high viscosity and high energy is used, the interval(w) must be reduced.
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