| 摘要 |
PURPOSE: A loading equipment for inspecting a photomask is provided to be capable of preventing damage of the photomask and reducing loading time. CONSTITUTION: A loading equipment(A) includes support members(10), a plurality of connection members(20) for fixing the support members, a support pole(30), a handgrip fixing plate(40), and a fixing stand(50). The support pole is protruded on the support member. The handgrip fixing plate is located between the support poles and provided with a handgrip(42). The fixing stand is provided with a fixing protrusion(52) for supporting edge portions of the photomask and preventing vibration.
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