| 摘要 |
PROBLEM TO BE SOLVED: To measure a capacity at a high speed, using a semiconductor parametric test system. SOLUTION: This capacity measuring system of the present invention is provided with a plurality of input and output terminals 152, 154 for connecting a measured element 14, a source major unit 110 for supplying a voltage or an electric current, a capacity measuring unit 108 provided with an impedance measuring function, and a switch matrix 112 for conducting various connections among the plurality of input and output terminals, the source major unit and the capacity measuring unit. COPYRIGHT: (C)2004,JPO&NCIPI
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