POLISHING METHOD OF PLATELIKE MEMBER

摘要

PROBLEM TO BE SOLVED: To obtain a polishing method which can polish a platelike member such as a thin printed board in particular in a simple manner without damage such as a bend uniformly over the whole surface and can reduce a change in size due to thermal deformation of the platelike member. SOLUTION: When polishing the platelike member, a rear of a surface to be polished of the member is stuck to a plane member harder than the platelike member, and the platelike member is polished while pressing the platelike member against the plane member by a polishing member. Further, the platelike member is stuck to the plane member by use of surface tension of a liquid without using an adhesive or a tape. COPYRIGHT: (C)2004,JPO&NCIPI