| 摘要 |
PROBLEM TO BE SOLVED: To provide a vapor growth device in which the displacement and rotation blurring of a susceptor due to thermal deformation of a susceptor support shaft is prevented and a uniform film can be formed on the surface of a substrate. SOLUTION: A rotary shaft 16 which rotatably supports an outer periphery of the susceptor 15 by a bearing 22 and which is projected from the center of the susceptor, and a driving shaft 24 for rotating the susceptor through the rotary shaft, are arranged in a non-contact state. A rotary force transmitting means 25 transmitting rotational movement of the driving shaft to the rotary shaft from the driving shaft is installed between the rotary shaft and the driving shaft. COPYRIGHT: (C)2004,JPO&NCIPI
|
