| 摘要 |
PROBLEM TO BE SOLVED: To provide a porous type workpiece-chucking apparatus and a workpiece-machining method, by which stable machining accuracy can be achieved by easily fixing a workpiece by suction without being restricted by the shape, size, and number of the workpieces, and without requiring complicated set-up changing work. SOLUTION: The chucking apparatus comprises at least one chuck plate 6 made of a porous substance, a table body 5 having a fitting portion 5a on the upper surface thereof to fit the chuck plate 6 thereinto, a plurality of suction ports 5b opened on the fitting portion 5a of the table body 5, and a masking element 4 which is made of a machinable material and covers at least the chuck plate 6 together with the workpiece 11 mounted on the chuck plate 6. COPYRIGHT: (C)2004,JPO&NCIPI
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