| 摘要 |
PROBLEM TO BE SOLVED: To precisely correct output variations caused by a change in temperature of a photoelectric sensor. SOLUTION: An aligner comprises the photoelectric sensors 13 and 15 for controlling the exposure of a wafer; memory 21 for storing output variations properties of the photoelectric sensors with respect to the energy of light irradiated on the photoelectric sensors 13 and 15; computing unit 22 which computes output variations of the photoelectric sensors 13 and 15, based on the energy of light irradiated on the photoelectric sensors 13 and 15, energy of the light per unit time, and the output variations properties stored in the memory 21; and correction unit 23 which corrects the outputs of the photoelectric sensors 13 and 15 based on the output variations computed by the computing unit 22. COPYRIGHT: (C)2004,JPO&NCIPI
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