| 摘要 |
PURPOSE: A method for forming a film having fine crystalline diamond characteristics on the matrix by methane-hydrogen based microwave plasma by setting the matrix to be treated on a substrate holder geometrically designed using an insert used as cutting tool as a matrix is provided. CONSTITUTION: The method comprises a step of positioning a matrix(200) on a substrate holder(100) on which groove(110) is formed; and a step of generating methane-hydrogen based microwave plasma(300), and constantly maintaining a distance between the matrix and the plasma so that a film having fine crystalline diamond characteristics is formed on the matrix, wherein the matrix is exposed to a position that is 2 to 3 mm above the surface of the substrate holder, and the distance between the surface of the matrix and the plasma is 2 to 10 mm, wherein the matrix is a WC based hard metal insert comprising 3 to 10 wt.% of Co and 10 wt.% or less of other carbide, wherein the matrix is a WC based hard metal having an average particle size of 0.5 to 6 μm, wherein the plasma is generated by coaxial or cavity type microwave power supply and other microwave power supply, and a plasma source used is a mixed gas of methane and hydrogen or a mixed gas of methane, hydrogen and carbon, and wherein the film formed has crystal grain size of 5 to 500 nm, thickness of 0.5 to 15 μm, surface roughness Ra of 5 to 40 nm and hardness of 80 to 120 GPa.
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