发明名称 PHOTOSENSITIVE COMPOSITION, PHOTOSENSITIVE MATERIAL, METHOD OF MANUFACTURING RELIEF PATTERN AND METHOD OF MANUFACTURING POLYIMIDE PATTERN
摘要 <P>PROBLEM TO BE SOLVED: To provide a photosensitive composition and a photosensitive material having excellent photosensitive characteristics and storage stability, and to provide a method of manufacturing a relief pattern and a method of manufacturing a polyimide pattern to form a polyimide pattern having excellent heat resistance, adhesion property and chemical resistance. <P>SOLUTION: The photosensitive composition is constituted by containing: a phenol compound expressed by general formula (I); a titanocene compound expressed by general formula (II); 3-aminopropyl trialkoxysilane expressed by general formula (III); and an addition polymerizable compound. The compound of formula (I) is, for example, phenol or ortho-cresol, and the compound of formula (II) is, for example, bis (cyclopentadienyl)-bis[2,6-difluoro-3-(2,5-dimethylpyrrol-1-yl)phenyl]titanium. <P>COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004184755(A) 申请公布日期 2004.07.02
申请号 JP20020352601 申请日期 2002.12.04
申请人 HITACHI CHEMICAL DUPONT MICROSYSTEMS LTD 发明人 SASAKI HAN
分类号 G03F7/004;G03F7/029;G03F7/038;H01L21/027 主分类号 G03F7/004
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