| 摘要 |
PROBLEM TO BE SOLVED: To provide such an apparatus that is comparatively simple in structure and can be easily controlled, and can ensure safety in taking in and out a cassette into/from a cassette placement part. SOLUTION: A cassette elevator 20a is provided with a plurality of cassette placement tables 18a arranged in parallel on a cassette placement part 10, which are kept to reciprocate freely and vertically independent of each other between a position A of the cassette taking-in and-out height and a position B of the delivery height of a substrate. A substrate transfer robot 38 is arranged freely movable along the arrangement direction of the cassette placement table 18a in substrate transfer part 12 interposed between the cassette placement part 10 and a substrate treatment part 14, and the substrate transfer robot 38 is accessed to respective cassettes C in sequence, thereby picking up a substrate W one by one from the cassette C to transfer it to the substrate treatment part 14. COPYRIGHT: (C)2004,JPO&NCIPI
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