发明名称 METHOD FOR FORMING RECESS AND METHOD FOR PRODUCING OPTICAL ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a method whereby in forming a recess on a polymer film by dry etching, the edge of the recess can be prevented from being rounded and to provide a method for producing a thin lightweight optical element having small recesses distributed with good positional accuraay and having a light-emitting means for efficiently changing the optical path of incident light so that horizontal incident light is shifted into vertical incident light. SOLUTION: The method for forming recesses comprises, in forming at least one recess of a specified shape by partly dry-etching at least one point on a polymer film, forming a metal film on the surface to be processed of the polymer and applying dry etching from the surface of the metal film to form the specified number of recesses having the specified shape and piercing the metal film parts. The method for forming the optical element comprises forming a light-emitting means by discontinuously distributing a plurality of recesses each provided with an optical path change slope with an angle of slope of 35 to 48 degrees on either surface of the polymer film. COPYRIGHT: (C)2004,JPO&NCIPI
申请公布号 JP2004182806(A) 申请公布日期 2004.07.02
申请号 JP20020349662 申请日期 2002.12.02
申请人 NITTO DENKO CORP 发明人 NAKANO YUUKI;ARIYOSHI TOSHIHIKO;UMEMOTO SEIJI;AMINO ICHIRO;KINOSHITA RIYOUJI
分类号 G02B5/02;C08J7/00;G02F1/13357;(IPC1-7):C08J7/00;G02F1/133 主分类号 G02B5/02
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