LAMINATED THIN FILM, ITS MANUFACTURING METHOD AND ALL-SOLID LITHIUM-ION SECONDARY BATTERY USING THE SAME

摘要

PROBLEM TO BE SOLVED: To solve the problem associated with formation of a laminated thin film through ion beam irradiation wherein the obtained thin film is electrically charged and causes film breakage or oxidation-reduction reaction unnecessary for keeping an electrical neutrality inside the film, and therefore physical properties of the film deteriorate.

SOLUTION: The thin film is formed through simultaneous irradiation of cations and anions or simultaneous irradiation of cations and electrons while inhibiting electrification.

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