PELLICLE FOR FLUORINE GAS EXCIMER LASER AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method of a pellicle for maintaining a high transmittancy and avoiding a damage of a pellicle film.

SOLUTION: A pellicle for fluorine excimer laser is composed of the pellicle film and a pellicle frame comprising a fluorine-containing polymer. This pellicle sets a tension (a) by thermomechanical analysis of the pellicle film at≤4.0×10-5N/μm2. Wherein, the tension (a) is defined by detecting a value of a force applied to a probe to be an absolute value of force/displacement as tension of the pellicle film and normalizing the absolute value by a thickness (μm) of the pellicle film, when setting an initial sample mounted weighing at 1.96×10-3N and setting a diameter of the probe contacted with the pellicle film surface at 4.9 mm and changing the thickness of the pellicle film from 0μm to -200μm at a speed of 100μm/min, by using a program displacement of the thermomechanical analysis at a central portion of the pellicle film pitched on a circular frame body with an inner diameter of 20 mm.

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