METHOD FOR REINFORCING THICKNESS OF NITRIDE THIN FILM

摘要

PURPOSE: A method for reinforcing the thickness of a nitride thin film is provided to improve sensitivity and strength by effectively intensifying weak portion alone of the nitride thin film using the stress distribution of the nitride thin film. CONSTITUTION: A stress distribution of a nitride thin film is obtained by carrying out a structure analysis. A weak portion of the nitride thin film is checked by using the stress distribution. The thickness of the weak portion is intensified by carrying out an etching process. The entire thickness of the nitride thin film and the thickness for reinforcement are decided by reducing the thickness for the entire nitride thin film and simultaneously controlling reinforcement thickness according to stress.