DISPOSITIF DE CONFINEMENT DE PLASMA,申请号FR20020003900-传众专利搜索

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发明名称	DISPOSITIF DE CONFINEMENT DE PLASMA
摘要
申请公布号	FR2838020(B1)	申请公布日期	2004.07.02
申请号	FR20020003900	申请日期	2002.03.28
申请人	CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE CNRS	发明人	LACOSTE ANA;ARNAL YVES ALBAN MARIE;BECHU STEPHANE;PELLETIER JACQUES
分类号	H05H1/46;C23C16/50;H01J37/32;H01L21/205;H01L21/304;H01L21/3065;(IPC1-7):H05H1/10	主分类号	H05H1/46
代理机构		代理人
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