OPTICAL INFORMATION RECORDING MEDIUM AND METHOD FOR MANUFACTURING SAME

摘要

Multilayer recording media having a titanium oxide layer formed by a single-wafer sputtering system have suffered from large variations in the transmittance due to variations in film thickness of the titanium oxide. In a multilayer recording medium having a titanium oxide layer according to the present invention, a second dielectric layer which is composed of or mainly contains a titanium oxide is formed on a first dielectric layer which is composed of or mainly contains a niobium oxide or a silicon oxide. When a single-wafer sputtering system is used, the system is provided with at least one chamber between a load lock chamber and a chamber in which a transmittance adjusting layer is formed for accelerating degasification of water and oxygen from a substrate.