ANNEALING METHOD AND DEVICE

摘要

A method for annealing a film, such as a ferroelectric or magnetic film is described. The method comprises the steps of (i) taking a film carried on a temperature sensitive substrate, the film having a radiation absorbing structure formed thereon, and (ii) illuminating the radiation absorbing structure with radiation produced by a laser. The radiation absorbing structure is heated sufficiently by the radiation to anneal all or some of the film without exceeding the temperature budget of the temperature sensitive substrate.