ELECTROSTATIC CHUCK HAVING EXCELLENT COOLING FUNCTION

摘要

PURPOSE: An electrostatic chuck having an excellent cooling function is provided to secure the uniformity of water temperature by radially installing cooling gas lines of a sector type in the same. CONSTITUTION: An electrostatic chuck(2) is used for fixing a wafer and cooling the wafer by supplying cooling gas to the wafer using a cooling gas line(6). A plurality of line parts are formed as one piece for completing the cooling gas line. Each line part is like a sector type structure. The line parts are radially arranged in the electrostatic chuck for uniformly conserving the temperature of the wafer.