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发明名称
Magnetron sputtering
摘要
申请公布号
GB2377228(B)
申请公布日期
2004.06.30
申请号
GB20020024233
申请日期
2001.07.18
申请人
* TRIKON HOLDINGS LIMITED
发明人
STEPHEN ROBERT * BURGESS
分类号
C23C14/35;C23C14/56;H01J37/34;(IPC1-7):H01J37/34
主分类号
C23C14/35
代理机构
代理人
主权项
地址
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