发明名称 |
An organic material evaporation source |
摘要 |
The present invention relates to an organic material evaporation source comprising a container for containing a liquid organic film material therein; an outlet port; a heating medium circulatory path for passing a heating medium therethrough, said heating medium circulatory path being disposed around said container; and a heating medium source for controlling the temperature of said heating medium to heat or cool said liquid organic film material contained in said container. <IMAGE>
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申请公布号 |
EP1433524(A1) |
申请公布日期 |
2004.06.30 |
申请号 |
EP20040004023 |
申请日期 |
1998.05.28 |
申请人 |
ULVAC, INC. |
发明人 |
NAGASHIMA, NAOKI;KASHIWABARA, IZUMI;NEGISHI, TOSHIO |
分类号 |
B01B1/00;B01J19/24;B05D7/24;C23C14/12;C23C14/24;C23C14/56;(IPC1-7):B01J4/00 |
主分类号 |
B01B1/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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