发明名称 An organic material evaporation source
摘要 The present invention relates to an organic material evaporation source comprising a container for containing a liquid organic film material therein; an outlet port; a heating medium circulatory path for passing a heating medium therethrough, said heating medium circulatory path being disposed around said container; and a heating medium source for controlling the temperature of said heating medium to heat or cool said liquid organic film material contained in said container. <IMAGE>
申请公布号 EP1433524(A1) 申请公布日期 2004.06.30
申请号 EP20040004023 申请日期 1998.05.28
申请人 ULVAC, INC. 发明人 NAGASHIMA, NAOKI;KASHIWABARA, IZUMI;NEGISHI, TOSHIO
分类号 B01B1/00;B01J19/24;B05D7/24;C23C14/12;C23C14/24;C23C14/56;(IPC1-7):B01J4/00 主分类号 B01B1/00
代理机构 代理人
主权项
地址