发明名称 |
Overlay target design method to minimize impact of lens aberrations |
摘要 |
A method of designing an alignment target system to minimize lens aberrations is disclosed. A first layer alignment target's pitch is selected based on the minimum feature size of the circuit. The second layer alignment target's pitch is selected based on the diffraction pattern of the first layer's target and the illumination settings of the second layer. Displacement errors are minimized when the second layer target's 1<st >diffraction order overlaps the first layer target's 0<th >diffraction order.
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申请公布号 |
US6756167(B2) |
申请公布日期 |
2004.06.29 |
申请号 |
US20020322613 |
申请日期 |
2002.12.19 |
申请人 |
MICRON TECHNOLOGY, INC. |
发明人 |
BALUSWAMY PARY;HOLSCHER RICHARD D. |
分类号 |
G03F7/20;(IPC1-7):G03F9/00;H01L23/544 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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