发明名称 |
Method for constructing an isolate microelectromechanical system (MEMS) device using surface fabrication techniques |
摘要 |
A method for fabricating an electrically isolated MEMS device is provided that uses surface fabrication techniques to form a conductive stationary MEMS element, and a movable MEMS element spaced apart from the conductive stationary MEMS element. The movable element includes a nonconductive base which provides for electrical isolation between a plurality of conductive members extending from the base. Modifications to the basic process permit the incorporation of a wafer-level cap which provides mechanical protection to the movable portions of the device.
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申请公布号 |
US6756310(B2) |
申请公布日期 |
2004.06.29 |
申请号 |
US20010963936 |
申请日期 |
2001.09.26 |
申请人 |
ROCKWELL AUTOMATION TECHNOLOGIES, INC. |
发明人 |
KRETSCHMANN ROBERT J.;LUCAK MARK A.;HARRIS RICHARD D.;KNIESER MICHAEL J. |
分类号 |
B81B7/00;B81C1/00;(IPC1-7):H01L21/00 |
主分类号 |
B81B7/00 |
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