| 摘要 |
PURPOSE: A cassette guide block of a wafer manufacturing chamber is provided to easily mold the cassette guide block and improve productivity by independently molding a loading frame and a secure support frame and connecting the frames with each other. CONSTITUTION: A cassette guide block of a wafer manufacturing chamber is provided with a loading plate(11) having a connection cavity(12), a loading frame(10-1) having a support part(14) and a fixing part(15), a secure support frame(10-2) having a deviation preventing part(17), and a connection part for connecting the loading frame and the secure support frame. The cassette guide block further includes a pair of connection protrusions(13) formed at both sides of the connection cavity. The loading frame and the secure support frame are made of stainless steel and a coating layer is formed at the outer surface of the stainless steel.
|
