LOAD LOCK PURGING SYSTEM, PURGING APPARATUS FOR RESTRAINING OXYGEN AND MOISTURE FROM LOAD LOCK AND METHOD FOR PURGING LOAD LOCK

摘要

PURPOSE: A load lock purging system, a purging apparatus and a method for purging a load lock are provided to keep a relatively low oxygen and moisture level under a film depositing process. CONSTITUTION: A purging apparatus(10) includes a load lock and a purge gas diffusing part. The load lock(12) defines a load lock chamber(18). The load lock includes a vacuum door(14) and an atmospheric door. The purge gas diffusing part(16) is installed nearer to the vacuum door than the atmospheric door in the load lock chamber. The purge gas diffusing part includes a porous section.