发明名称 PROCEDE DE FABRICATION DE COUCHES MINCES SUR UN SUPPORT SPECIFIQUE ET UNE APPLICATION
摘要 <p>The invention relates to a method for producing a thin layer ( 8 ) containing at least one component ( 6, 6 A, 6 B) comprising:-a preparation step, wherein an added layer ( 2, 3, 4 ) is created on a support ( 1 ), at least one part ( 2 ) of said layer being adapted for local embrittling and said substrate and the part which can be embrittled being made from different materials and/or having different microstructures; an embrittlement step, wherein a fragile underlayer ( 5 ) is produced in the part which can be embrittled; a work step, wherein at least one component ( 6, 6 A, 6 B) is created on said added layer; and a separation step, wherein a dissociation is induced in the part which can be embrittled, along said fragile underlayer, in order to produce a thin layer ( 8 ) comprising a part of said added layer and said component.</p>
申请公布号 FR2821697(B1) 申请公布日期 2004.06.25
申请号 FR20010002890 申请日期 2001.03.02
申请人 COMMISSARIAT A L'ENERGIE ATOMIQUE 发明人 ASPAR BERNARD;CLERC JEAN FREDERIC
分类号 H01L27/12;H01L21/02;H01L21/336;H01L21/68;H01L21/762;H01L29/786;(IPC1-7):H01L21/304;G09F9/35 主分类号 H01L27/12
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