| 摘要 |
PROBLEM TO BE SOLVED: To provide a vacuum deaeration unit capable of easily changing the installation number of a gas permeable membrane without requiring the large-scale modification, and a vacuum pump unit used for the vacuum deaeration unit. SOLUTION: The vacuum deaeration unit disposes a gas permeable membrane 20 allowing only gas to permeate in a vacuum chamber 10c inside a vacuum container 10 and inhibiting liquid from permeating therein, and allows the gas to permeate through the gas permeable membrane 20 by reducing the pressure in the vacuum chamber 10c and deaerates dissolved gas from the liquid. The vacuum deaeration unit has a connection means 11 capable of connecting a plurality of vacuum containers 10, and a communication means 12 communicating both vacuum chambers 10c inside the adjacent vacuum containers 10 in connecting the plurality of vacuum containers 10 by the connection means. COPYRIGHT: (C)2004,JPO
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