ALN material and electrostatic chuck incorporating same

摘要

An electrostatic chuck is provided which includes a ceramic body comprising aluminum nitride (AlN), and at least one electrode in the ceramic body. According to a particular feature of this embodiment, the aluminum nitride has a resistivity ratio rho10V/rho500V less than about 5. In this regard, rho10V represents the resistivity of the electrostatic chuck at 10 applied volts while rho500V represents the resistivity of the AlN material at 500 applied volts.