发明名称 |
Digital video based array detector for parallel process control and radiation driver for micro-scale devices |
摘要 |
Invention discloses apparatus for parallel monitoring and control of arrays of similar processes. Method and apparatus for metrological control of planar arrays of micro-devices. Method and apparatus for remote radiation driver that actuates large linear and planar arrays of micro and nano devices. Methods include control of micro stamps arrays and arrays of microcantilevers.
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申请公布号 |
US2004120577(A1) |
申请公布日期 |
2004.06.24 |
申请号 |
US20030605516 |
申请日期 |
2003.10.05 |
申请人 |
TOUZOV IGOR V. |
发明人 |
TOUZOV IGOR V. |
分类号 |
G02B27/46;(IPC1-7):G06K9/46;G01B11/24;G01B11/30;G02B26/00;G06K9/66 |
主分类号 |
G02B27/46 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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