发明名称 |
STRUCTURE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE USING THE SAME |
摘要 |
PROBLEM TO BE SOLVED: To provide a fine structure along with its manufacturing method that utilizes self organizing phenomenon or self forming phenomenon. SOLUTION: A film-like aluminum germanium mixture 100 comprises a columnar structure 1 containing aluminum and a germanium region 2 encircling the columnar structure. It characteristically contains germanium by the range of 20-70 atm%. COPYRIGHT: (C)2004,JPO |
申请公布号 |
JP2004179229(A) |
申请公布日期 |
2004.06.24 |
申请号 |
JP20020340820 |
申请日期 |
2002.11.25 |
申请人 |
CANON INC |
发明人 |
FUKUTANI KAZUHIKO;DEN TORU |
分类号 |
H01L29/06;H01L21/314;H01L21/8247;H01L27/10;H01L29/66;H01L29/788;H01L29/792;(IPC1-7):H01L29/66;H01L21/824 |
主分类号 |
H01L29/06 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|