发明名称 STRUCTURE, MANUFACTURING METHOD THEREOF, AND ELECTRONIC DEVICE USING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a fine structure along with its manufacturing method that utilizes self organizing phenomenon or self forming phenomenon. SOLUTION: A film-like aluminum germanium mixture 100 comprises a columnar structure 1 containing aluminum and a germanium region 2 encircling the columnar structure. It characteristically contains germanium by the range of 20-70 atm%. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004179229(A) 申请公布日期 2004.06.24
申请号 JP20020340820 申请日期 2002.11.25
申请人 CANON INC 发明人 FUKUTANI KAZUHIKO;DEN TORU
分类号 H01L29/06;H01L21/314;H01L21/8247;H01L27/10;H01L29/66;H01L29/788;H01L29/792;(IPC1-7):H01L29/66;H01L21/824 主分类号 H01L29/06
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